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Insights into the Role of Plasma in Atmospheric Pressure Chemical Vapor Deposition of Titanium Dioxide Thin Films | Scientific Reports
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Plasma Enhanced Chemical Vapor Deposition Systems
A simple microwave plasma-enhanced chemical vapour deposition system for the production of carbon nanotubes | Semantic Scholar
Microwave Plasma Enhanced Chemical Vapor Deposition (PECVD) | Nanomaterials and Thin Films Lab
INFLUENCE OF THE TEMPERATURE OF MOLYBDENUM SUBSTRATES ON THE STRUCTURE OF DIAMOND COATINGS OBTAINED BY CHEMICAL VAPOR DEPOSITION FROM A HIGH-SPEED MICROWAVE PLASMA JET | SpringerLink
What is plasma-enhanced chemical vapor deposition (PECVD)/plasma-assisted chemical vapor deposition (PACVD)?